FT-IR spectrometers with adapter for analysis of silicon components
The optics of the spectrometer are optimized for the analysis of silicon components. Spectrum measurement is possible in reflection and transmission mode.
Infrared spectrometer Nicolet 6700 with adapter for measuring Si components
Recommended not only for the following applications:
- Carbon and oxygen content in silicone - process control in the photovoltaic industry
- Interstitial carbon and oxygen content in silicon wafers (supports SEMI, ASTM, JEIDA and DIN methodology)
- Dopant concentration in dielectric films (BPSG, PSG, FSG, etc.)
- Koncentrace dopantu v dielektrických filmech (BPSG, PSG, FSG, etc.)
- Epitaxial layer thickness
- MEMS, SOI, polysilicon and III - V thin films
- And many more
The system can be assembled especially for your requirements, newly based on the Nicolet iS20 FT-IR spectrometer or the iS50 series spectrometers (combination with Raman spectroscopy!).
Connection of Nicolet FT-IR spectrometers with thermogravimeters of various types and manufacturers.