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Identification of materials in semiconductor components

Infrared active materials used in semiconductor devices have near-field characteristic spectra that allow them to be directly identified using neaSCOPE microscopes. The SEM image of the test structure of the transistor (gray) reveals different materials and highlights the interface between them thanks to the applied decorative etching. There are seven individual transistors. The topographic cross-sectional image of the sample shows a flat surface (result of the sample polishing process). The near-field amplitude image (in color) reveals a high signal for metal components, a medium-strength signal for the Si substrate, and a low signal for the insulating SiO.

Detailed analysis of a semiconductor device: SEM image, topography and near field amplitude

Higher resolution single transistor measurements demonstrate the ability of neaSCOPE microscopes to analyze a single component. Depending on the laser frequency used for near-field imaging, the SiN or SiO parts of the transistor can be highlighted, as seen in the individual images. The dependence of contrasts on frequency can be explained by material-specific near-field resonances, which allows the identification of materials. The high sensitivity of near-field resonances to the dielectric properties of materials allows detailed analysis of single components.

IR-neaSCOPE+fs is designed for pump-probe spectroscopy with 10fs temporal and 10nm spatial resolution: it enables ultra-fast nanoscale science.
IR-neaSCOPE+s enables IR imaging and nano-FTIR spectroscopy by detecting radiation reflected from a standard AFM tip. It is a universal solution for all types of materials. It measures both absorbed and reflected radiation simultaneously and uses the fastest and most reliable modules for nano-imaging and nano-spectroscopy.
THz-neaSCOPE+s is a versatile platform for nano-imaging and terahertz (THz) spectroscopy.
IR-neaSCOPE+TERs is a revolution in nano-spectroscopy thanks to a combination of nano-FTIR and Raman spectroscopy techniques, providing complete spectral analysis.
cryo-neaSCOPE+xs is a pioneering instrument for nanoscale optical imaging and spectroscopy in an extreme cryogenic environment.

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